Standardization of methods for instrument specification, instrument calibration, instrument operation, data acquisition, data processing, and data analysis in the use of X-ray Reflectometry (XRR) and X-ray Fluorescence (XRF) Analysis for surface chemical and structural analysis.

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published ISO standard *

under the direct responsibility of ISO/TC 201/SC 10


Participating members


Observing members

* number includes updates

Reference Title Type
ISO/TC 201/SC 10/SG 1 XRR technique Working group
ISO/TC 201/SC 10/WG 1 XRF technique Working group


Liaison Committees from ISO/TC 201/SC 10

ISO/TC 201/SC 10 can access the documents of the committees below:

Reference Title ISO/IEC
ISO/TC 147 Water quality ISO
ISO/TC 202 Microbeam analysis ISO
ISO/TC 229 Nanotechnologies ISO

ISO/TC 201/SC 10 - Secretariat

JISC [Japan]

Japanese Industrial Standards Committee
Technical Regulations, Standards & Conformity Assessment Policy Unit
Ministry of Economy, Trade and Industry
1-3-1, Kasumigaseki, Chiyoda-ku
Tokyo 100 - 8901

Tel: +81 3 35 01 94 71
Fax: +81 3 35 80 86 37