Standardization in the field of surface chemical analysis. Surface chemical analysis includes analytical techniques in which beams of electrons, ions, neutral atoms or molecules, or photons are incident on the specimen material and scattered or emitted electrons, ions, neutral atoms or molecules, or photons are detected. It also includes techniques in which probes are scanned over the surface and surface-related signals are detected.


  • Scanning electron microscopy which is within the scope of ISO/TC 202.


With current techniques of surface chemical analysis, analytical information is obtained for regions close to a surface (generally within 20 nm) and analytical information-versus-depth data are obtained with surface analytical techniques over greater depths.

Quick links


published ISO standards *

related to the TC and its SCs

of which 7 under the direct responsibility of ISO/TC 201


ISO standards under development *

related to the TC and its SCs

of which 1 under the direct responsibility of ISO/TC 201


Participating members


Observing members

* number includes updates

Reference Title Type
ISO/TC 201/SC 1 Terminology Sub committee
ISO/TC 201/SC 2 General procedures Sub committee
ISO/TC 201/SC 3 Data management and treatment Sub committee
ISO/TC 201/SC 4 Depth profiling Sub committee
ISO/TC 201/SC 6 Secondary ion mass spectrometry Sub committee
ISO/TC 201/SC 7 Electron spectroscopies Sub committee
ISO/TC 201/SC 8 Glow discharge spectroscopy Sub committee
ISO/TC 201/SC 9 Scanning probe microscopy Sub committee
ISO/TC 201/SC 10 X-ray Reflectometry (XRR) and X-ray Fluorescence (XRF) Analysis Sub committee
ISO/TC 201/SG 1 Nano-materials characterization Working group
ISO/TC 201/WG 4 Surface Characterization of Biomaterials Working group
ISO/TC 201/WG 5 Optical interface analysis Working group
Liaison Committees to ISO/TC 201

The committees below can access the documents of ISO/TC 201:

Reference Title ISO/IEC
ISO/TC 107 Metallic and other inorganic coatings ISO
ISO/TC 202 Microbeam analysis ISO
ISO/TC 229 Nanotechnologies ISO
Liaison Committees from ISO/TC 201

ISO/TC 201 can access the documents of the committees below:

Reference Title ISO/IEC
IEC/TC 113 Nanotechnology for electrotechnical products and systems IEC
ISO/TC 150 Implants for surgery ISO
ISO/TC 202 Microbeam analysis ISO
ISO/TC 229 Nanotechnologies ISO
Organizations in liaison (Category A and B)
Acronym Title Category
IUPAC International Union of Pure and Applied Chemistry A
IUVSTA International Union for Vacuum Science, Technique and Applications A
VAMAS Versailles Project on Advanced Materials and Standards A

Date Month Location TC/SC Note
31 October 2019 Tsukuba (Japan) ISO/TC 201/SC 1 *
30-1 October-November 2019 Tsukuba-shi (Japan) ISO/TC 201/SC 8 **
  2020   ISO/TC 201/SC 1 **

* Information definite but meeting not yet formally convened
** Provisional

ISO/TC 201 - Secretariat

JISC Japan
National Institute of Advanced Industrial Science and Technology(AIST)
AIST Tsukuba Central 2
1-1-1 Umezono, Tsukuba
Ibaraki 305-8568

Secretariat direct:
Dr Satoshi Gonda