Secretariat: JISCCommittee Manager:
Chairperson:Dr Hidehiko Nonaka
ISO Technical Programme Manager [TPM]:ISO Editorial Programme Manager [EPM]:
- Creation date: 1991
Standardization in the field of surface chemical analysis. Surface chemical analysis includes analytical techniques in which beams of electrons, ions, neutral atoms or molecules, or photons are incident on the specimen material and scattered or emitted electrons, ions, neutral atoms or molecules, or photons are detected. It also includes techniques in which probes are scanned over the surface and surface-related signals are detected.
- Scanning electron microscopy which is within the scope of ISO/TC 202.
With current techniques of surface chemical analysis, analytical information is obtained for regions close to a surface (generally within 20 nm) and analytical information-versus-depth data are obtained with surface analytical techniques over greater depths.