Standardization in the field of microbeam analysis (measurement, parameters, methods and reference materials) which uses electrons as an incident beam and electrons and photons as the detection signal.
Note:
The purpose is to analyze the compositional and structural characteristics of solid materials. The volume of analysis will generally involve a depth up to 10 micrometers and a surface area less than 100 square micrometers.
| Reference | Title | Type |
|---|---|---|
| ISO/TC 202/SC 1 | Terminology | Sub committee |
| ISO/TC 202/SC 2 | Electron probe microanalysis | Sub committee |
| ISO/TC 202/SC 3 | Analytical electron microscopy | Sub committee |
| ISO/TC 202/SC 4 | Scanning electron microscopy (SEM) | Sub committee |
| ISO/TC 202/WG 1 | General procedures and data management | Working group |
| ISO/TC 202/WG 7 | Microbeam analysis - Electron Backscatter Diffraction - Measurement of average grain size | Working group |
The committees below can access the documents of ISO/TC 202:
| Reference | Title | ISO/IEC |
|---|---|---|
| ISO/TC 201 | Surface chemical analysis | ISO |
| ISO/TC 201/SC 10 | X-ray Reflectometry (XRR) and X-ray Fluorescence (XRF) Analysis | ISO |
| ISO/TC 229 | Nanotechnologies | ISO |
ISO/TC 202 can access the documents of the committees below:
| Reference | Title | ISO/IEC |
|---|---|---|
| ISO/TC 201 | Surface chemical analysis | ISO |
| ISO/TC 229 | Nanotechnologies | ISO |
| Acronym | Title | Category |
|---|---|---|
| EMAS | European Microbeam Analysis Society | A |