International Standard
ISO 23131-3:2026
Ellipsometry — Part 3: Transparent single layer model
Reference number
ISO 23131-3:2026
Edition 1
2026-01
© ISO 2026
Read sample
Published (Edition 1, 2026)

ISO 23131-3:2026

Language
Format
CHF 159
* Shipping costs not included
Convert Swiss francs (CHF) to your currency

Abstract

This document uses ellipsometric measurements and their analysis to specify the method for the determination of the layer thickness d of a transparent layer and the optical (refractive index n) or dielectric (real part ε1) constants/functions based on the transparent single layer model within a spectral region, for which k = 0 applies.

General information

  • Status
     : Published
    Publication date
     : 2026-01
    Stage
    : International Standard published [60.60]
  • Edition
     : 1
    Number of pages
     : 29
  • Technical Committee :
    ISO/TC 107
    ICS :
    17.020 
  • RSS updates

Life cycle

Sustainable Development Goals

This standard contributes to the following Sustainable Development Goals

1
No Poverty
3
Good Health and Well-being
6
Clean Water and Sanitation
7
Affordable and Clean Energy
8
Decent Work and Economic Growth
9
Industry, Innovation and Infrastructure
11
Sustainable Cities and Communities
12
Responsible Consumption and Production
13
Climate Action

Got a question?

Check out our Help and Support

  2. Store
  3. Store
  4. ICS
  5. 17
  6. 17.020
  7. ISO 23131-3:2026