ISO/AWI 26100

Projet

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Résumé

This document specifies procedures for the measurement of the foil thickness of the specimen by a combination of (scanning) transmission electron microscope (STEM/TEM) and electron energy-loss spectroscopy (EELS). This document applies to measuring the foil thickness less than the thickness of electron transparency. Accurate measurement of thin foil thickness is paramount for STEM/TEM characterization of materials, and several methods have been proposed. Among them, EELS is a representative method because, unlike other methods, it can be applied regardless of the state of the material. Low-loss spectra including zero-loss and plasmon peaks are used for the measurement.

Informations générales

État actuel
: Projet

Stade
: Nouveau projet enregistré au programme de travail du TC/SC [20.00]
Edition
: 1
Comité technique :
ISO/TC 202/SC 3
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