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ISO/AWI 26100
Microbeam analysis — Analytical electron microscopy — The thickness measurement of thin foil by electron energy loss spectroscopy
Reference number
ISO/AWI 26100
ISO/AWI 26100
Edition 1
© ISO 2026
Tema de trabajo aprobado
Resumen
This document specifies procedures for the measurement of the foil thickness of the specimen by a combination of (scanning) transmission electron microscope (STEM/TEM) and electron energy-loss spectroscopy (EELS). This document applies to measuring the foil thickness less than the thickness of electron transparency. Accurate measurement of thin foil thickness is paramount for STEM/TEM characterization of materials, and several methods have been proposed. Among them, EELS is a representative method because, unlike other methods, it can be applied regardless of the state of the material. Low-loss spectra including zero-loss and plasmon peaks are used for the measurement.
Informaciones generales
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Estado: En desarrolloEtapa: Nuevo proyecto registrado en el programa de trabajo TC/SC [20.00]
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Edición: 1
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Comité Técnico :ISO/TC 202/SC 3
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