Under publication
ISO 25164
Physical vapor deposition coatings — Magnetron sputtering deposition of TiAlSiN thin films — Specification
Reference number
ISO 25164
Edition 1
2026-07
© ISO 2026
Under publication
Under publication (Edition 1, 2026)
Final production steps (up to seven weeks).

Abstract

This document specifies the technical requirements for TiAlSiN thin films deposited by magnetron sputtering.

General information

  • Status
     : Under development
    Publication date
     : 2026-07
    Stage
    : International Standard under publication [60.00]
  • Edition
     : 1
  • Technical Committee :
    ISO/TC 107/SC 9
    ICS :
    25.220.40 
  • RSS updates

Life cycle

Sustainable Development Goals

This standard contributes to the following Sustainable Development Goal

9
Industry, Innovation and Infrastructure

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