Proof
ISO/PRF 25164
Physical vapor deposition coatings — Magnetron sputtering deposition of TiAlSiN thin films — Specification
Reference number
ISO/PRF 25164
Edition 1
2026-07
© ISO 2026
Proof
Under development (Edition 1, 2026)
This draft is in the approval phase.

Abstract

This document specifies the technical requirements for TiAlSiN thin films deposited by magnetron sputtering.

General information

  • Status
     : Under development
    Publication date
     : 2026-07
    Stage
    : Proof sent to secretariat or FDIS ballot initiated: 8 weeks [50.20]
  • Edition
     : 1
    Number of pages
     : 6
  • Technical Committee :
    ISO/TC 107/SC 9
    ICS :
    25.220.40 
  • RSS updates

Life cycle

Sustainable Development Goals

This standard contributes to the following Sustainable Development Goal

9
Industry, Innovation and Infrastructure

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