International Standard
ISO 19383:2026
Atomic layer deposition — Chemical characteristics and related process specifications of atomic layer deposition precursors
Reference number
ISO 19383:2026
Edition 1
2026-06
© ISO 2026
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Published (Edition 1, 2026)

ISO 19383:2026

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Abstract

This document defines the chemical characteristics and related process specifications of atomic layer deposition precursors, including assay content, metal purity and anion content specification.

General information

  • Status
     : Published
    Publication date
     : 2026-06
    Stage
    : International Standard published [60.60]
  • Edition
     : 1
    Number of pages
     : 13
  • Technical Committee :
    ISO/TC 107
    ICS :
    25.220.01 
  • RSS updates

Life cycle

Sustainable Development Goals

This standard contributes to the following Sustainable Development Goal

9
Industry, Innovation and Infrastructure

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