| Subcommittee | Subcommittee Title | Published standards | Standards under development |
|---|---|---|---|
| ISO/TC 201/SC 1 | Terminology | 3 | 0 |
| ISO/TC 201/SC 2 | General procedures | 9 | 2 |
| ISO/TC 201/SC 3 | Data management and treatment | 5 | 0 |
| ISO/TC 201/SC 4 | Depth profiling | 6 | 0 |
| ISO/TC 201/SC 6 | Secondary ion mass spectrometry | 12 | 1 |
| ISO/TC 201/SC 7 | Electron spectroscopies | 23 | 5 |
| ISO/TC 201/SC 8 | Glow discharge spectroscopy | 6 | 0 |
| ISO/TC 201/SC 9 | Scanning probe microscopy | 8 | 4 |
| ISO/TC 201/SC 10 | X-ray Reflectometry (XRR) and X-ray Fluorescence (XRF) Analysis | 1 | 2 |
Filter :
| Standard and/or project under the direct responsibility of ISO/TC 201 Secretariat | Stage | ICS |
|---|---|---|
|
Surface chemical analysis — Determination of surface elemental contamination on silicon wafers by total-reflection X-ray fluorescence (TXRF) spectroscopy |
95.99 | |
|
Surface chemical analysis — Determination of surface elemental contamination on silicon wafers by total-reflection X-ray fluorescence (TXRF) spectroscopy |
90.93 | |
|
Evaluation of thickness, density and interface width of thin films by X-ray reflectometry — Instrumental requirements, alignment and positioning, data collection, data analysis and reporting |
95.99 | |
|
Evaluation of thickness, density and interface width of thin films by X-ray reflectometry — Instrumental requirements, alignment and positioning, data collection, data analysis and reporting |
60.60 | |
|
Surface chemical analysis — Chemical methods for the collection of elements from the surface of silicon-wafer working reference materials and their determination by total-reflection X-ray fluorescence (TXRF) spectroscopy |
90.93 | |
|
Surface chemical analysis — Chemical methods for the collection of elements from the surface of silicon-wafer working reference materials and their determination by total-reflection X-ray fluorescence (TXRF) spectroscopy — Amendment 1 |
60.60 | |
|
Surface chemical analysis — Surface characterization — Measurement of the lateral resolution of a confocal fluorescence microscope |
90.93 | |
|
Surface chemical analysis — Use of Total Reflection X-ray Fluorescence spectroscopy in biological and environmental analysis |
90.60 | |
|
Surface chemical analysis — Characterization of functional glass substrates for biosensing applications |
60.60 | |
|
Surface Chemical Analysis — Measurement of lateral and axial resolutions of Raman microscope |
40.60 | |
|
Surface chemical analysis — Determination of the minimum detectability of surface plasmon resonance device |
60.60 |
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