ISO 16413:2013 Preview

Evaluation of thickness, density and interface width of thin films by X-ray reflectometry -- Instrumental requirements, alignment and positioning, data collection, data analysis and reporting

General information

  • Status :  Published
    Publication date : 2013-02
  • Edition : 1
    Number of pages : 30
  • :
    ISO/TC 201
    Surface chemical analysis
  • 35.240.70
    IT applications in science
    71.040.40
    Chemical analysis

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