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ISO/AWI TS 22933
Surface chemical analysis — Secondary ion mass spectrometry — Method for the measurement of mass resolution in SIMS
Reference number
ISO/AWI TS 22933
Edition 2
© ISO 2026
New project
Under development
Drafting has started.
Will replace ISO/TS 22933:2022

Abstract

This document specifies a method for measuring the mass resolution in SIMS, and how to compare the mass resolution between different instruments (e.g. TOF-SIMS, Magnetic SIMS, Quadrupole SIMS, Fourier Transform SIMS, etc.) by considering the peak shapes.

General information

  • Status
     : Under development
    Stage
    : New project approved [10.99]
  • Edition
     : 2
  • Technical Committee :
    ISO/TC 201/SC 6
  • RSS updates

Life cycle

Sustainable Development Goals

This standard contributes to the following Sustainable Development Goals

3
Good Health and Well-being
9
Industry, Innovation and Infrastructure

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