Abstract

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This document defines terms for surface chemical analysis in the area of optical interface analysis including ellipsometry, Raman spectroscopy and nonlinear optical techniques as well as general optical terms.


General information 

  • Status
     :  Published
    Publication date
     : 2022-06
  • Edition
     : 1
    Number of pages
     : 35
  • Technical Committee
     : ISO/TC 201/SC 1 Terminology
  • ICS
     :
    01.040.71 Chemical technology (Vocabularies)
    71.040.40 Chemical analysis

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