International Standard
ISO 14644-15:2026
Cleanrooms and associated controlled environments — Part 15: Assessment of suitability for use of equipment and materials by airborne chemical concentration
Reference number
ISO 14644-15:2026
Edition 2
2026-05
© ISO 2026
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Published (Edition 2, 2026)

ISO 14644-15:2026

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Abstract

This document specifies requirements and guidelines for assessing the chemical airborne cleanliness of equipment and materials which are foreseen to be used in cleanrooms and associated controlled environments that are linked to the ISO standard for air cleanliness by chemical concentration (see ISO 14644-8).

This document does not apply to the following:

  • health and safety requirements;
  • compatibility with cleaning agents and techniques;
  • cleanability;
  • biocontamination;
  • specific requirements of equipment and materials for processes and products;
  • design details of equipment.

General information

  • Status
     : Published
    Publication date
     : 2026-05
    Stage
    : International Standard published [60.60]
  • Edition
     : 2
    Number of pages
     : 19
  • Technical Committee :
    ISO/TC 209
    ICS :
    13.040.35 
  • RSS updates

Life cycle

Sustainable Development Goals

This standard contributes to the following Sustainable Development Goal

3
Good Health and Well-being

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