International Standard
ISO 14644-15:2026
Cleanrooms and associated controlled environments — Part 15: Assessment of suitability for use of equipment and materials by airborne chemical concentration
Reference number
ISO 14644-15:2026
Edition 2
2026-05
Preview
ISO 14644-15:2026
91616
недоступно на русском языке
Опубликовано (Версия 2, 2026)

ISO 14644-15:2026

ISO 14644-15:2026
91616
Язык
Формат
CHF 135

Тезис

This document specifies requirements and guidelines for assessing the chemical airborne cleanliness of equipment and materials which are foreseen to be used in cleanrooms and associated controlled environments that are linked to the ISO standard for air cleanliness by chemical concentration (see ISO 14644-8).

This document does not apply to the following:

  • health and safety requirements;
  • compatibility with cleaning agents and techniques;
  • cleanability;
  • biocontamination;
  • specific requirements of equipment and materials for processes and products;
  • design details of equipment.

Общая информация

  •  : Опубликовано
     : 2026-05
    : Опубликование международного стандарта [60.60]
  •  : 2
  • ISO/TC 209
    13.040.35 
  • RSS обновления

Жизненный цикл

Цели в области устойчивого развития

Данный стандарт разработан для достижения следующих Цель устойчивого развития

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