Abstract Preview

ISO 13083:2015 describes a method for measuring the spatial (lateral) resolution of scanning capacitance microscopes (SCMs) or scanning spreading resistance microscopes (SSRMs), which are widely used in imaging the distribution of carriers and other electrical properties in semiconductor devices. The method involves the use of a sharp-edged artefact.

General information

  • Status :  Published
    Publication date : 2015-08
  • Edition : 1
    Number of pages : 14
  • :
    ISO/TC 201/SC 9
    Scanning probe microscopy
  • 71.040.40
    Chemical analysis

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