Abstract 

ISO 18516:2006 describes three methods for measuring the lateral resolution achievable in Auger electron spectrometers and X-ray photoelectron spectrometers under defined settings. The straight-edge method is suitable for instruments where the lateral resolution is expected to be larger than 1 micrometre. The grid method is suitable if the lateral resolution is expected to be less than 1 micrometre but more than 20 nm. The gold-island method is suitable for instruments where the lateral resolution is expected to be smaller than 50 nm.

Annexes A, B and C provide illustrative examples of the measurement of lateral resolution.


General information

  • Status :  Withdrawn
    Publication date : 2006-11
  • Edition : 1
    Number of pages : 24
  • :
    ISO/TC 201/SC 2
    General procedures
  • 71.040.40
    Chemical analysis

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