ISO 18114:2003 Preview

Surface chemical analysis -- Secondary-ion mass spectrometry -- Determination of relative sensitivity factors from ion-implanted reference materials

ISO 18114:2003 specifies a method of determining relative sensitivity factors (RSFs) for secondary-ion mass spectrometry (SIMS) from ion-implanted reference materials.

The method is applicable to specimens in which the matrix is of uniform chemical composition, and in which the peak concentration of the implanted species does not exceed one atomic percent.


General information

  • Status :  Published
    Publication date : 2003-04
  • Edition : 1
    Number of pages : 4
  • :
    ISO/TC 201/SC 6
    Secondary ion mass spectrometry
  • 71.040.40
    Chemical analysis

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A standard is reviewed every 5 years



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  • Now under review
    ISO 18114:2003

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