This document specifies a method of determining relative sensitivity factors (RSFs) for secondary-ion mass spectrometry (SIMS) from ion-implanted reference materials.
The method is applicable to specimens in which the matrix is of uniform chemical composition, and in which the peak concentration of the implanted species does not exceed one atomic percent.
Status: PublishedPublication date: 2021-05
Edition: 2Number of pages: 4
Technical Committee: ISO/TC 201/SC 6 Secondary ion mass spectrometry
- ICS :
- 71.040.40 Chemical analysis
This standard contributes to the following Sustainable Development Goal:
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ISO 18114:2021Stage: 60.60
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