ISO/AWI 26317
Abstract
This standard specifies the procedure for analyzing the same part of a material when measuring the same material with multiple different microscopic measuring instruments. This standard aims to show analysts the necessary procedures for analyzing the same part of a microscopic region of the same sample using a sample holder engraved with alignment markers as reference points shared by multiple microscopic measuring instruments. It applies to instruments capable of microscopic measurement with a spatial resolution ranging from sub-micron to approximately 10 μm, and with a field of view of approximately 100 μm or more. This standard does not apply to microscopic measuring instruments that cannot read the position coordinates of the sample movement stage and cannot specify the address of the analysis part based on the alignment marker. This standard applies to alignment on a two-dimensional plane, not to three-dimensional alignment.
General information
-
Status: Under developmentStage: New project approved [10.99]
-
Edition: 1
-
Technical Committee :ISO/TC 201/SC 2
- RSS updates