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ISO/AWI 26317
Surface chemical analysis — General procedures — Guideline of alignment procedure foridentical location analysis between different microscopic measuring instruments
Ссылочный номер
ISO/AWI 26317
Версия 1
© ISO 2026
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Тезис

This standard specifies the procedure for analyzing the same part of a material when measuring the same material with multiple different microscopic measuring instruments. This standard aims to show analysts the necessary procedures for analyzing the same part of a microscopic region of the same sample using a sample holder engraved with alignment markers as reference points shared by multiple microscopic measuring instruments. It applies to instruments capable of microscopic measurement with a spatial resolution ranging from sub-micron to approximately 10 μm, and with a field of view of approximately 100 μm or more. This standard does not apply to microscopic measuring instruments that cannot read the position coordinates of the sample movement stage and cannot specify the address of the analysis part based on the alignment marker. This standard applies to alignment on a two-dimensional plane, not to three-dimensional alignment.

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  • Текущий статус
     : В стадии разработки
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    : Новая рабочая тема утверждена [10.99]
  • Версия
     : 1
  • Технический комитет :
    ISO/TC 201/SC 2
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