International Standard
ISO 25178-606:2026
Geometrical product specifications (GPS) — Surface texture: Areal — Part 606: Design and characteristics of non-contact (focus variation) instruments
Reference number
ISO 25178-606:2026
Edition 2
2026-05
© ISO 2026
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Published (Edition 2, 2026)

ISO 25178-606:2026

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Abstract

This document specifies the design and characteristics of focus variation instruments for areal measurement of surface topography. Because surface profiles can be extracted from areal surface topography data, the methods described in this document are also applicable to profiling measurements as well.

This document applies to focus variation without pattern illumination or with fixed pattern illumination. This document does not cover methods using varying pattern illumination during the measurement.

General information

  • Status
     : Published
    Publication date
     : 2026-05
    Stage
    : International Standard published [60.60]
  • Edition
     : 2
    Number of pages
     : 19
  • Technical Committee :
    ISO/TC 213
    ICS :
    17.040.40 
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