ISO 24688:2022

Published (Edition 1, 2022)

ISO 24688:2022

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Abstract

This document specifies the substrate conditions and testing of the modulation period (including the principles for low-angle X-ray methods, the requirements of the coatings, the requirements for X-ray measuring apparatus, the calibration of apparatus and samples, and the testing conditions and calculation process) of nano-multilayer coatings by low-angle X-ray methods including X-ray reflectivity (XRR) and glancing incident X-ray diffraction (GIXRD).

General information

Status
: Published

Publication date
: 2022-07

Stage
: International Standard published [60.60]
Edition
: 1

Number of pages
: 8
Technical Committee :
ISO/TC 107/SC 9

ICS :
25.220.01
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