ISO/DTS 21383

Qualification of the scanning electron microscope for quantitative measurements

General information ^

Status : Under development
Edition : 1
Technical Committee
:
ISO/TC 202/SC 4

Scanning electron microscopy (SEM)
ICS :

37.020

Optical equipment

Life cycle

A standard is reviewed every 5 years

Revisions / Corrigenda

Now under development
ISO/DTS 21383

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