Abstract Preview
ISO 14606:2015 gives guidance on the optimization of sputter-depth profiling parameters using appropriate single-layered and multilayered reference materials in order to achieve optimum depth resolution as a function of instrument settings in Auger electron spectroscopy, X-ray photoelectron spectroscopy and secondary ion mass spectrometry.
ISO 14606:2015 is not intended to cover the use of special multilayered systems such as delta doped layers.
General information
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Status : PublishedPublication date : 2015-12
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Edition : 2Number of pages : 16
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- ICS :
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Chemical analysis
Buy this standard
Format | Language | |
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Paper |
- CHF88
Life cycle
A standard is reviewed every 5 years
Revisions / Corrigenda
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Previously
ISO 14606:2000
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Now
ISO 14606:2015
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