Abstract Preview

ISO 13424:2013 specifies the minimum amount of information required in reports of analyses of thin films on a substrate by XPS. These analyses involve measurement of the chemical composition and thickness of homogeneous thin films, and measurement of the chemical composition as a function of depth of inhomogeneous thin films by angle-resolved XPS, XPS sputter-depth profiling, peak-shape analysis, and variable photon energy XPS.

General information

  • Status :  Published
    Publication date : 2013-10
  • Edition : 1
    Number of pages : 46
  • :
    ISO/TC 201/SC 7
    Electron spectroscopies
  • 71.040.40
    Chemical analysis

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