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Abstract Preview

ISO 14644-10:2012 defines the classification system for cleanliness of surfaces in cleanrooms with regard to the presence of chemical compounds or elements (including molecules, ions, atoms and particles). It is applicable to all solid surfaces in cleanrooms and associated controlled environments such as walls, ceilings, floors, working environment, tools, equipment and devices.


General information

  • Status :  Published
    Publication date : 2013-03
  • Edition : 1
    Number of pages : 30
  • Technical Committee
    :
    ISO/TC 209
    Cleanrooms and associated controlled environments
  • ICS :
    13.040.35
    Cleanrooms and associated controlled environments

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PDF + ePub
Paper
  • CHF138

Life cycle

A standard is reviewed every 5 years



Revisions / Corrigenda

  • Now under review
    ISO 14644-10:2013

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