Abstract Preview
ISO 14644-10:2012 defines the classification system for cleanliness of surfaces in cleanrooms with regard to the presence of chemical compounds or elements (including molecules, ions, atoms and particles). It is applicable to all solid surfaces in cleanrooms and associated controlled environments such as walls, ceilings, floors, working environment, tools, equipment and devices.
General information
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Status : PublishedPublication date : 2013-03
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Edition : 1Number of pages : 30
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- ICS :
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Cleanrooms and associated controlled environments
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Paper |
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Life cycle
A standard is reviewed every 5 years
Revisions / Corrigenda
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Now under review
ISO 14644-10:2013
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