ISO 14644-10:2013 Preview

Cleanrooms and associated controlled environments -- Part 10: Classification of surface cleanliness by chemical concentration

ISO 14644-10:2012 defines the classification system for cleanliness of surfaces in cleanrooms with regard to the presence of chemical compounds or elements (including molecules, ions, atoms and particles). It is applicable to all solid surfaces in cleanrooms and associated controlled environments such as walls, ceilings, floors, working environment, tools, equipment and devices.


General information

  • Current status : Published
    Publication date : 2013-03
  • Edition : 1
    Number of pages : 30
  • :
    ISO/TC 209
    Cleanrooms and associated controlled environments
  • 13.040.35
    Cleanrooms and associated controlled environments

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