Abstract Preview

ISO 20341:2003 specifies procedures for estimating three depth resolution parameters, viz the leading-edge decay length, the trailing-edge decay length and the Gaussian broadening, in SIMS depth profiling using multiple delta-layer reference materials.

It is not applicable to delta-layers where the chemical and physical state of the near-surface region, modified by the incident primary ions, is not in the steady state.

General information

  • Status :  Published
    Publication date : 2003-07
  • Edition : 1
    Number of pages : 5
  • :
    ISO/TC 201/SC 6
    Secondary ion mass spectrometry
  • 71.040.40
    Chemical analysis

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Format Language
  • CHF38

Life cycle

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