Standards catalogue

ISO/TC 112

Vacuum technology

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Standard and/or project under the direct responsibility of ISO/TC 112 Secretariat Stage ICS
ISO 1607-1:1980 [Withdrawn]
Positive-displacement vacuum pumps -- Measurement of performance characteristics -- Part 1: Measurement of volume rate of flow (pumping speed)
95.99
ISO 1607-1:1993 [Withdrawn]
Positive-displacement vacuum pumps -- Measurement of performance characteristics -- Part 1: Measurement of volume rate of flow (pumping speed)
95.99
ISO 1607-2:1978 [Withdrawn]
Positive displacement vacuum pumps -- Measurement of performance characteristics -- Part 2: Measurement of ultimate pressure
95.99
ISO 1607-2:1989 [Withdrawn]
Positive-displacement vacuum pumps -- Measurement of performance characteristics -- Part 2: Measurement of ultimate pressure
95.99
ISO 1608-1:1980 [Withdrawn]
Vapour vacuum pumps -- Measurement of performance characteristics -- Part 1: Measurement of volume rate of flow (pumping speed)
95.99
ISO 1608-1:1993
Vapour vacuum pumps -- Measurement of performance characteristics -- Part 1: Measurement of volume rate of flow (pumping speed)
90.93
ISO 1608-2:1978 [Withdrawn]
Vapour vacuum pumps -- Measurement of performance characteristics -- Part 2: Measurement of critical backing pressure
95.99
ISO 1608-2:1989
Vapour vacuum pumps -- Measurement of performance characteristics -- Part 2: Measurement of critical backing pressure
90.93
ISO 1609:1986
Vacuum technology -- Flange dimensions
90.93
ISO 2861:2013
Vacuum technology -- Dimensions of clamped-type quick-release couplings
60.60
ISO 2861-1:1974 [Withdrawn]
Vacuum technology -- Quick-release couplings -- Dimensions -- Part 1: Clamped type
95.99
ISO 2861-2:1980 [Withdrawn]
Vacuum technology -- Quick release couplings -- Dimensions -- Part 2: Screwed type
95.99
ISO 3529-1:1981
Vacuum technology -- Vocabulary -- Part 1: General terms
90.93
ISO 3529-2:1981
Vacuum technology -- Vocabulary -- Part 2: Vacuum pumps and related terms
90.92
ISO/NP 3529-2 [Under development]
Vacuum technology -- Vocabulary -- Part 2: Vacuum pumps and related terms
10.99
ISO 3529-3:1981 [Withdrawn]
Vacuum technology -- Vocabulary -- Part 3: Vacuum gauges
95.99
ISO 3529-3:2014
Vacuum technology -- Vocabulary -- Part 3: Total and partial pressure vacuum gauges
60.60
ISO 3567:2011
Vacuum gauges -- Calibration by direct comparison with a reference gauge
90.93
ISO/TS 3567:2005 [Withdrawn]
Vacuum gauges -- Calibration by direct comparison with a reference gauge
95.99
ISO 3669:1986 [Withdrawn]
Vacuum technology -- Bakable flanges -- Dimensions
95.99
ISO 3669:2017
Vacuum technology -- Bakeable flanges -- Dimensions of knife-edge flanges
60.60
ISO/TS 3669-2:2007 [Withdrawn]
Vacuum technology -- Bakable flanges -- Part 2: Dimensions of knife-edge flanges
95.99
ISO 3753:1977 [Withdrawn]
Vacuum technology -- Graphical symbols
95.99
ISO 5302:2003
Vacuum technology -- Turbomolecular pumps -- Measurement of performance characteristics
90.60
ISO 9803:1993 [Withdrawn]
Vacuum technology -- Pipeline fittings -- Mounting dimensions
95.99
ISO 9803-1:2007
Vacuum technology -- Mounting dimensions of pipeline fittings -- Part 1: Non knife-edge flange type
90.93
ISO 9803-2:2007
Vacuum technology -- Mounting dimensions of pipeline fittings -- Part 2: Knife-edge flange type
90.93
ISO 14291:2012
Vacuum gauges -- Definitions and specifications for quadrupole mass spectrometers
90.20
ISO 19685:2017
Vacuum technology -- Vacuum gauges -- Specifications, calibration and measurement uncertainties for Pirani gauges
60.60
ISO/DIS 20146 [Under development]
Vacuum technology -- Vacuum gauges -- Specifications, calibration and measurement uncertainties for capacitance diaphragm gauge
40.20
ISO/DTS 20175 [Under development]
Vacuum technology -- Vacuum gauges - Calibration of quadrupole mass spectrometers for partial pressure measurement
30.99
ISO/DTS 20177 [Under development]
Vacuum technology - Vacuum gauges -- Procedures to measure and report outgassing rates
30.99
ISO 21358:2007
Vacuum technology -- Right-angle valve -- Dimensions and interfaces for pneumatic actuator
90.93
ISO 21360:2007 [Withdrawn]
Vacuum technology -- Standard methods for measuring vacuum-pump performance -- General description
95.99
ISO 21360-1:2012
Vacuum technology -- Standard methods for measuring vacuum-pump performance -- Part 1: General description
90.93
ISO 21360-2:2012
Vacuum technology -- Standard methods for measuring vacuum-pump performance -- Part 2: Positive displacement vacuum pumps
90.93
ISO/CD 21360-3 [Under development]
Vacuum technology -- Standard methods for measuring pump performance -- Part 3: Specific parameters for mechanical booster pumps
30.99
ISO/DIS 21360-4 [Under development]
Vacuum technology -- Standard methods for measuring vacuum-pump performance -- Part 4: Turbomolecular vacuum pumps
40.20
ISO 27892:2010
Vacuum technology -- Turbomolecular pumps -- Measurement of rapid shutdown torque
90.93
ISO 27893:2011
Vacuum technology -- Vacuum gauges -- Evaluation of the uncertainties of results of calibrations by direct comparison with a reference gauge
90.93
ISO/TS 27893:2009 [Withdrawn]
Vacuum technology -- Vacuum gauges -- Evaluation of the uncertainties of results of calibrations by direct comparison with a reference gauge
95.99
ISO 27894:2009
Vacuum technology -- Vacuum gauges -- Specifications for hot cathode ionization gauges
90.93
ISO 27895:2009
Vacuum technology -- Valves -- Leak test
90.93

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