ISO 5302:2003

Vacuum technology -- Turbomolecular pumps -- Measurement of performance characteristics

ISO 5302:2003 specifies methods for the measurements of performance characteristics of turbomolecular pumps. It is applicable to all sizes and all types of turbomolecular pumps, with mechanical or magnetic bearings, and with or without an additional drag stage.


General information

  • Status :  Withdrawn
    Publication date : 2003-07
  • Edition : 1
  • :
    ISO/TC 112
    Vacuum technology
  • 23.160
    Vacuum technology

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