Abstract Preview
This document specifies the metrological characteristics of areal instruments for measuring surface topography. Because surface profiles can be extracted from surface topography images, most of the terms defined in this document can also be applied to profiling measurements.
General information
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Status : PublishedPublication date : 2019-02
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Edition : 1Number of pages : 21
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Technical Committee:Dimensional and geometrical product specifications and verification
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- ICS :
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Properties of surfaces
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