This standard was last reviewed and confirmed in 2022. Therefore this version remains current.
The measurements deal with diffusion pumps, ejector pumps, and booster pumps, i.e. pumps capable of operation in both the molecular and laminar flow regions.
Status: PublishedPublication date: 1993-12
Edition: 2Number of pages: 3
Technical Committee: ISO/TC 112 Vacuum technology
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|std 1 38|
|std 2 38||Paper|