Status : Published (Under review)
This standard was last reviewed and confirmed in 2022. Therefore this version remains current.
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Abstract

The measurements deal with diffusion pumps, ejector pumps, and booster pumps, i.e. pumps capable of operation in both the molecular and laminar flow regions.

General information

  • Status
     : Published
    Publication date
     : 1993-12
    Stage
    : International Standard confirmed [90.93]
  • Edition
     : 2
    Number of pages
     : 3
  • Technical Committee :
    ISO/TC 112
    ICS :
    23.160 
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