ISO 14644-14:2016 Preview

Cleanrooms and associated controlled environments -- Part 14: Assessment of suitability for use of equipment by airborne particle concentration

ISO 14644-14:2016 specifies a methodology to assess the suitability of equipment (e.g. machinery, measuring equipment, process equipment, components and tools) for use in cleanrooms and associated controlled environments, with respect to airborne particle cleanliness as specified in ISO 14644‑1. Particle sizes range from 0,1 µm to equal to or larger than 5 µm (given in ISO 14644‑1).

NOTE Where regulatory agencies impose supplementary guidelines or restrictions, appropriate adaptation of the assessment methodology can be required.

The following items are not covered by this ISO 14644-14:2016:

- assessment of suitability with respect to biocontamination;

- testing for suitability of decontamination agents and techniques;

- cleanability of equipment and materials;

- requirements on design of equipment and selection of materials;

- physical properties of materials (e.g. electrostatic, thermal properties);

- optimizing performance of equipment for specific process applications;

- selection and use of statistical methods for testing;

- protocols and requirements for local safety regulations.


General information

  • Status :  Published
    Publication date : 2016-09
  • Edition : 1
    Number of pages : 21
  • :
    ISO/TC 209
    Cleanrooms and associated controlled environments
  • 13.040.35
    Cleanrooms and associated controlled environments

Buy this standard

Format Language
PDF
Paper
  • CHF118

Got a question?

Check out our FAQs

Customer care
+41 22 749 08 88

Opening hours:
Monday to Friday - 09:00-12:00, 14:00-17:00 (UTC+1)

Keep up to date with ISO

Sign up to our newsletter for the latest news, views and product information

 Subscribe