Abstract Preview

This International Standard provides procedures for electron microprobe elemental-mapping analysis using

wavelength-dispersive spectrometry. The choice between mapping with the electron beam moving digitally

across the specimen (electron beam mapping) and mapping with stage movement only (large-area mapping) is

assessed. It describes five types of data processing: the raw X‑ray intensity data method, the k‑value method,

the calibration method, the correlation method and the matrix correction method.

General information

  • Status :  Published
    Publication date : 2012-03
  • Edition : 1
    Number of pages : 10
  • :
    ISO/TC 202/SC 2
    Electron probe microanalysis
  • 71.040.50
    Physicochemical methods of analysis

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  • CHF58

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