This standard was last reviewed and confirmed in 2020. Therefore this version remains current.
ISO 27894:2009 defines terms relating to hot cathode ionization vacuum gauges, and specifies which parameters are given by manufacturers of hot cathode ionization gauges and which measurement uncertainties have to be considered when operating these gauges.
Status : PublishedPublication date : 2009-12
Edition : 1Number of pages : 19
Technical Committee:Vacuum technology
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