ISO 14644-6:2007

Cleanrooms and associated controlled environments -- Part 6: Vocabulary

ISO 14644-6:2007 establishes a vocabulary of terms and definitions related to cleanrooms and associated controlled environments.


General information

  • Current status : Withdrawn
    Publication date : 2007-07
  • Edition : 1
  • :
    ISO/TC 209
    Cleanrooms and associated controlled environments
  • 13.040.35
    Cleanrooms and associated controlled environments

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