Surface chemical analysis -- Auger electron spectroscopy and X-ray photoelectron spectroscopy -- Determination of lateral resolution, analysis area, and sample area viewed by the analyser
This standard has been revised by ISO/TR 19319:2013
ISO/TR 19319:2003 provides information for measuring (1) the lateral resolution, (2) the analysis area, and (3) the sample area viewed by the analyser in Auger electron spectroscopy and X-ray photoelectron spectroscopy.
A standard is reviewed every 5 years
Revisions / Corrigenda