Abstract 

ISO 17973:2002 specifies a method for calibrating the kinetic energy scales of Auger electron spectrometers with an uncertainty of 3 eV, for general analytical use in identifying elements at surfaces. In addition, it specifies a method for establishing a calibration schedule. It is applicable to instruments used in either direct or differential mode, where the resolution is less than or equal to 0,5 % and the modulation amplitude for the differential mode, if used, is 2 eV peak-to-peak. It is applicable to those spectrometers equipped with an inert gas ion gun or other method for sample cleaning and with an electron gun capable of operating at 4 keV or higher beam energy.


General information

  • Status :  Withdrawn
    Publication date : 2002-10
  • Edition : 1
    Number of pages : 11
  • :
    ISO/TC 201/SC 7
    Electron spectroscopies
  • 71.040.40
    Chemical analysis

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