Draft
International Standard
ISO/DIS 21360-4.2
Vacuum technology — Standard methods for measuring vacuum-pump performance — Part 4: Turbomolecular vacuum pumps
Reference number
ISO/DIS 21360-4.2
Edition 2
Проект Международный стандарт
Preview
ISO/DIS 21360-4.2
89852
недоступно на русском языке
Проект данного международного стандарта находится на этапе рассмотрения членами ИСО.
Текущее издание: ISO 21360-4:2018

ISO/DIS 21360-4.2

ISO/DIS 21360-4.2
89852
Язык
Формат
CHF 67

Тезис

This document, in conjunction with ISO 21360-1, specifies methods for the measurement of performance characteristics of turbomolecular vacuum pumps. It is applicable to all sizes and all types of turbomolecular vacuum pumps, including those

— with mechanical or magnetic bearings;

— with or without an additional drag stage(s) or other pumping stages on the shaft;

— with one or more inlet ports.

Since turbomolecular vacuum pumps are backed by primary pumps, their performance cannot be completely defined by the volume flow rate curve. Also, the driving device and the backing pressure of the turbomolecular vacuum pump is important to the performance.

The following completes the performance characteristics:

— information about throughputs and backing pressure of the turbomolecular vacuum pump;

— the compression ratio curve (compression ratio vs backing pressure of turbomolecular vacuum pump).

Общая информация

  •  : В стадии разработки

    You can help develop this draft international standard by contacting your national member

    : Начало голосования по проекту между-народно-го стандарта: 3 мес. [40.20]
  •  : 2
  • ISO/TC 112
    23.160 
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