ISO 25178-603:2013 Preview
Geometrical product specifications (GPS) -- Surface texture: Areal -- Part 603: Nominal characteristics of non-contact (phase-shifting interferometric microscopy) instruments
This standard was last reviewed and confirmed in 2018. Therefore this version remains current.
ISO 25178-603:2013 describes the metrological characteristics of phase-shifting interferometric (PSI) profile and areal surface texture measuring microscopes.
Buy this standard
|PDF + ePub|
A standard is reviewed every 5 years
Revisions / Corrigenda