ISO 25178-603:2013 Preview

Geometrical product specifications (GPS) -- Surface texture: Areal -- Part 603: Nominal characteristics of non-contact (phase-shifting interferometric microscopy) instruments

ISO 25178-603:2013 describes the metrological characteristics of phase-shifting interferometric (PSI) profile and areal surface texture measuring microscopes.


General information

  • Current status : Published
    Publication date : 2013-10
  • Edition : 1
    Number of pages : 28
  • :
    ISO/TC 213
    Dimensional and geometrical product specifications and verification
  • 17.040.20
    Properties of surfaces

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