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ISO/TC 202  - Microbeam analysis

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Standards and projects under the direct responsibility of ISO/TC 202 Secretariat and its SCs

Standard and/or projectStageICSTC
ISO/DIS 19214.2
Microbeam analysis -- Analytical electron microscopy -- Guidelines for apparent growth direction determination of wirelike crystals by transmission electron microscopy
40.99 71.040.50ISO/TC 202/SC 3
ISO/DIS 19463
Microbeam analysis -- Electron probe microanalyser (EPMA) -- Guidelines for performing quality assurance procedures
40.00 71.040.50ISO/TC 202/SC 2
ISO/AWI 20171
Tag image file format for Scanning electron microscopy(TIFF/SEM)
20.00ISO/TC 202/SC 4
ISO/DIS 20263
Microbeam analysis -- Analytical transmission electron microscopy -- Determination method for interface position in the cross-sectional image of the layered materials
40.00 71.040.50
37.020
ISO/TC 202/SC 3
ISO/WD 20720
Microbeam analysis -- Methods of the specimen preparation for particle analysis
20.20ISO/TC 202
ISO/AWI TS 21383
Qualification of the scanning electron microscope for quantitative measurements
20.00ISO/TC 202/SC 4
ISO/AWI 21466
Method for evaluating critical dimensions by CD-SEM
20.00ISO/TC 202/SC 4
ISO 22489
Microbeam analysis -- Electron probe microanalysis -- Quantitative point analysis for bulk specimens using wavelength dispersive X-ray spectroscopy
60.00 71.040.99ISO/TC 202/SC 2
ISO/WD 25498
Microbeam analysis -- Analytical electron microscopy -- Selected-area electron diffraction analysis using a transmission electron microscope
20.20 71.040.50ISO/TC 202/SC 3
ISO/WD 29301
Microbeam analysis -- Analytical transmission electron microscopy -- Methods for calibrating image magnification by using reference materials having periodic structures
20.99 37.020ISO/TC 202/SC 3