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ISO/TC 201/SC 2  - General procedures

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Standards and projects under the direct responsibility of ISO/TC 201/SC 2 Secretariat

Standard and/or projectStageICS
ISO 16242:2011
Surface chemical analysis -- Recording and reporting data in Auger electron spectroscopy (AES)
60.60 71.040.40
ISO 16243:2011
Surface chemical analysis -- Recording and reporting data in X-ray photoelectron spectroscopy (XPS)
60.60 71.040.40
ISO/TR 16268:2009
Surface chemical analysis -- Proposed procedure for certifying the retained areic dose in a working reference material produced by ion implantation
60.60 71.040.40
71.040.30
ISO 18116:2005
Surface chemical analysis -- Guidelines for preparation and mounting of specimens for analysis
90.93 71.040.40
ISO 18117:2009
Surface chemical analysis -- Handling of specimens prior to analysis
60.60 71.040.40
ISO 18516:2006
Surface chemical analysis -- Auger electron spectroscopy and X-ray photoelectron spectroscopy -- Determination of lateral resolution
90.92 71.040.40
ISO/CD 18516
Surface chemical analysis -- Determination of lateral resolution and sharpness in beam based methods
30.99 71.040.40
ISO/TR 19319:2013
Surface chemical analysis -- Fundamental approaches to determination of lateral resolution and sharpness in beam-based methods
60.60 71.040.40