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ISO/TC 202/SC 4  - Scanning electron microscopy (SEM)

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Standards and projects under the direct responsibility of ISO/TC 202/SC 4 Secretariat

Standard and/or projectStageICS
ISO/AWI 20171
Tag image file format for Scanning electron microscopy(TIFF/SEM)
20.00
ISO/AWI TS 21383
Qualification of the scanning electron microscope for quantitative measurements
20.00
ISO/AWI 21466
Method for evaluating critical dimensions by CD-SEM
20.00