Geometrical product specifications (GPS) -- Surface texture: Areal -- Part 604: Nominal characteristics of non-contact (coherence scanning interferometry) instruments
ISO 25178-604:2013 specifies the metrological characteristics of coherence scanning interferometry (CSI) systems for 3D mapping of surface height.
Document published on: 2013-08-01 Edition: 1 (Monolingual) ICS: 17.040.20 Status: Published Stage: 60.60 (2013-07-24) TC/SC: ISO/TC 213 Number of Pages: 41
This standard has not been revised
No corrigenda or amendments available