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ISO 3530:1979
Vacuum technology -- Mass-spectrometer-type leak-detector calibration
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Abstract
Only leak detectors are described which have an integral high vacuum system to maintain the sensing element of the mass spectrometer at a low pressure. Two procedures are outlined, one to determine the minimum detectable leak rate and the other for determination of the minimum detectable concentration ratio.
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Edition: 1 (Monolingual) ICS: 23.160 Status: Published Stage: 90.93 (2010-01-28) TC/SC: ISO/TC 135/SC 6 Number of Pages: 10 -
No revision information available
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No corrigenda or amendments available
