ISO/DIS 13083

Surface chemical analysis - Scanning Probe Microscopy- Standards on the definition and calibration of spatial resolution of Scanning Spreading Resistance Microscopy and Scanning Capacitance Microscopy

• Edition: 1 (Monolingual)	ICS: 71.040.40
  Status: Under development	Stage: 40.20 (2013-03-18)
  TC/SC: ISO/TC 201/SC 9	Number of Pages:
  Target publication date: 2014-12-31

• No revision information available

• No corrigenda or amendments available