ISO/TR 19319:2003

Surface chemical analysis -- Auger electron spectroscopy and X-ray photoelectron spectroscopy -- Determination of lateral resolution, analysis area, and sample area viewed by the analyser

This standard has been revised by: ISO/TR 19319:2013

Abstract

ISO/TR 19319:2003 provides information for measuring (1) the lateral resolution, (2) the analysis area, and (3) the sample area viewed by the analyser in Auger electron spectroscopy and X-ray photoelectron spectroscopy.

Edition: 1 (Monolingual) ICS: 71.040.40

Status: Withdrawn Stage: 95.99 (2013-03-06)

TC/SC: ISO/TC 201/SC 2 Number of Pages:
Revised by: ISO/TR 19319:2013
No corrigenda or amendments available