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ISO 16413:2013
Evaluation of thickness, density and interface width of thin films by X-ray reflectometry -- Instrumental requirements, alignment and positioning, data collection, data analysis and reporting
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Edition: 1 (Monolingual) ICS: 35.240.70; 71.040.40 Status: Published Stage: 60.60 (2013-02-12) TC/SC: ISO/TC 201 Number of Pages: 30 -
No revision information available
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No corrigenda or amendments available
