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ISO 14644-6:2007
Cleanrooms and associated controlled environments -- Part 6: Vocabulary
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Abstract
ISO 14644-6:2007 establishes a vocabulary of terms and definitions related to cleanrooms and associated controlled environments.
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Edition: 1 (Bilingual) ICS: 13.040.35 Status: Published Stage: 90.60 (2010-12-17) TC/SC: ISO/TC 209 Number of Pages: 34 -
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