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ISO 14644-6:2007
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Cleanrooms and associated controlled environments -- Part 6: Vocabulary

Abstract

ISO 14644-6:2007 establishes a vocabulary of terms and definitions related to cleanrooms and associated controlled environments.

 

  • Document published on: 2007-07-15
    Edition: 1 (Bilingual) ICS: 13.040.35
    Status: Withdrawn Stage: 95.99 (2014-04-23)
    TC/SC: ISO/TC 209 Number of Pages:
  • No revision information available

  • No corrigenda or amendments available

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